论文标题:SOI-MMI光波导器件与光开关研究
Study on the SOI-MMI Optical Waveguide Units and Optical Switches
论文作者
论文导师 张峰,论文学位 博士后,论文专业 电子科学与技术
论文单位 中国科学院研究生院（上海微系统与信息技术研究所）,点击次数 99,论文页数 80页File Size5241K
2005-02-01论文网 http://www.lw23.com/lunwen_355445217/
AON; WDM; multimode interference (MMI) coupler; optical switch; SOI
基于自镜像效应的多模干涉(MMI)型光波导器件因其具有结构紧凑、带宽大、制作容差性好等优点，已广泛应用于各种集成光学器件中。本文开展了一系列基于SOI材料的MMI型光波导器件和光开关的研究。 介绍了MMI光耦合器的基本原理，分析了光场分布，介绍了普通型MMI光耦合器、配对型MMI光耦合器和对称型MMI光耦合器的工作原理和入射光场位置需满足的条件，介绍了双曲型MMI光耦合器的结构和工作原理； 设计和优化了2×2阶配对型和双曲型MMI光耦合器，采用BPM方法对其进行了模拟，分析了多模波导的尺寸以及不同的归一化宽度对其输出不均衡度和附加损耗的影响； 设计和优化了不同衬底的1×4阶对称型MMI光耦合器，并进行了模拟，分析了通过改变衬底厚度改变波导层与衬底层之间折射率差值对于器件性能的影响； 设计和优化了配对型和斜边型1.3／1.55μm波分复用器，给出器件的波长隔离度和插入损耗两个关键技术指标随器件结构参数变化的分布曲线，分析了变化规律； 简要介绍了MMI型马赫—曾德光开关的原理，设计了1×4阶和4×4阶SOI-MMI马赫—曾德光开关，通过计算得出了不同开关状态所需的驱动条件，并给出了相应的光场分布； 介绍了区域调制光开关的工作原理，设计和优化了3×3阶SOI-MMI型区域调制光开关，对于其多模波导的结构进行了优化设计，分别给出了开关处于不同输入输出状态时，各折射率调制区的长度对于开关的消光比和各通道间串扰的影响，给出了经模拟获得的分布曲线，最后获得了开关的最佳结构参数。
Multimode interference waveguide units, based on the principle of self-imaging in multimode waveguides, are widely applied in the integrated optics for their excellent characteristics, such as compactness, wide bandwidth, large manufacturing tolerances and so on. In this thesis, a series of SOI-MMI optical waveguide components and optical switches are studied.The principle of the MMI optical couplers was described and the distributing of the optical field was analyzed. The principle of the general MMI optical coupler, the paired interference and the symmetric interference MMI optical coupler were explained, moreover, the corresponding positions of the input optical field were introduced. The structure and operation principle of the hyperbola MMI optical coupler were also given.The 2×2 paired and hyperbola optical couplers were designed and optimized. The performances of the couplers were simulated with BPM. The effects of the variation of the size and the normalized width of the multimode waveguide on the output uniformity and excess loss were analyzed.The 1×4 symmetric MMI optical couplers with different background refractive index were designed and optimized. The effect on the characteristics of the couplers with different refractive index difference between the core and the background of the waveguide was studies.The 1.3/1.55μm paired and tilted MMI demultiplexers were designed and optimized. The contrast and insertion loss versus the structure parameters of the unit were given.The operating principle of the MMI Mach-Zehnder optical switch was briefly described. 1 × 4 and 4×4 SOI-MMI Mach-Zehnder optical switch were designed. The driving conditions of the optical switch were calculated and the distributions of the corresponding optical field were displayed.The operating principle of the partial index modulation optical switch wasexplained and 3X3 SOI-MMI partial index modulation optical switch was designed. The multimode waveguide was optimized, moreover, the extinction and cross-talk of the switch versus the length of the index modulation regions were given. At last, the optimum structure parameters of the switch were obtained.
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