论文标题:硅纳米孔柱阵列及其SnO_2复合薄膜的酒精敏感特性研究
论文作者
论文导师 李新建,论文学位 硕士,论文专业 光学
论文单位 郑州大学,点击次数 79,论文页数 71页File Size3345K
2006-05-20论文网 http://www.lw23.com/lunwen_978750512/
Silicon Nanoporous Pillar Array (Si-NPA); Tin dioxide; Gas sensor; Ethanol sensor
多孔硅薄膜传感技术是20世纪90年代发展起来的一门崭新的传感器技术，是随着多孔硅研究的深入和纳米材料的实用化成长起来的，由于多孔硅(Porous Silicon，PS)具有大的比表面积，能与多种敏感材料复合且可以和工业化集成电路相兼容等特点又能够满足人们对气敏传感器集成化、智能化、多功能化的要求使得多孔硅基薄膜气敏传感器和多孔硅传感器成为当前传感器技术领域中研究的一个热点。 我们通过控制铁钝化水热腐蚀P型单晶硅的条件获得一种特殊的多孔硅结构-硅纳米孔柱阵列(Silicon Nanoporous Pillar Array，Si-NPA)。这种独特的结构体系在保持多孔硅表面多孔结构特征的同时，其表面形成的规则阵列构成了气体传输的有效通道，从结构特点上看Si-NPA直接作为敏感材料或作为衬底材料在气敏传感方面都有着潜在的应用价值。 围绕本研究课题，开展的实验工作及其结果如下： 1．材料制备及表征：研究了不同制备条件对Si-NPA和SnO_2／Si-NPA传感性能的影响，采用扫描电子显微镜(SEM)、透射电镜(TEM)、X射线衍射(XRD)、红外光谱(FT-IR)等技术手段对Si-NPA和SnO_2／Si-NPA的形貌结构以及材料的成分、发光等性质进行了表征和分析，获得了材料制备的最佳工艺条件。 2．Si-NPA气敏元件及气敏特性测试：通过磁控溅射的方法在Si-NPA上镀上梳状铝电极并对样品进行处理制成传感元件，对Si-NPA气敏元件在酒精、丙酮等化学有机气体气氛中元件的灵敏度、稳定性和选择性进行了测试，结果表明Si-NPA气敏元件对酒精有较大的响应，对丙酮等其他气体响应较小，而且元件的响应时间短，稳定性较好。 3．SnO_2／Si-NPA复合薄膜气敏元件及气敏特性测试：采用溶胶-凝胶法，在严格控制制备条件和反复实验的基础上，制备出透明、均一、稳定的二氧化锡溶胶。应用匀胶旋涂和退火处理的方法将纳米级二氧化锡和衬底材料Si-NPA有效地结合在一起，对样品进行处理得到SnO_2／Si-NPA复合薄膜气敏元件。通过控制匀胶和退火处理的条件既保证了复合薄膜保持衬底材料
The porous silicon (Porous Silicon, PS) thin film sensor is a brand-new sensor technology which has developed along with the nanometer material practical application and the PS research from 1990s. Owing to the properties of large specific surface area, technological compatibility with the typical silicon arts, easy compound with many kinds of sensitive materials, it can satisfy people"s demand to sensor"s integration、intellectualization、multi-purpose request. The PS gas sensors and PS-based gas sensors have received much attention.We obtain a special porous silicon material which has peculiar pillar array structure by iron-passivated hydrothermally etching, we name it as Silicon Nanoporous Pillar Array (Si-NPA). The most notable structural features of Si-NPA not only makes it has large surface area, but also provides a very effective pathway for vapor transportation and convenient to efficient absorbing and desorbing of gas molecules. Therefore the Si-NPA has latent application value for gas sensor in view of its unique feature.Several topics studied in this thesis are listed below:1. Material preparation and characterization: The sensing properties of Si-NPA and SnO_2/Si-NPA under different condition have been studied. SEM、TEM、XRD、 FT-IR were used to analyze and characterize the morphology and structure of Si-NPA and SnO_2/Si-NPA. The best condition of material preparation was found.2. Si-NPA-based sensor and test of it"s sensing properties: Si-NPA-based gas sensor was studied in this chapter. First, sensors in which Si-NPA are used as the gas sensitive layer. Measurements are taken for acetone and ethanol vapor. However the responses of ethanol are better than those of ethanol. We also analyzed the relations in sensing characteristic and material structure.3. SnO_2/Si-NPA-based sensor and test of it"s sensing properties: Ethanol sensors were made based on SnO_2/Si-NPA and the corresponding sensing properties
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